Specification
|
Axis |
X(Scan) |
Y(Step) |
| Work area |
700mm |
800mm |
| Guide |
Ceramic air bearing |
Air bearing |
| load mass |
100kg |
- |
| Acceleration |
2m/sec² |
|
| Position accuracy(보정후) |
±0.3㎛ |
±1.1㎛ |
| Repeatability |
±0.2㎛ |
±0.2㎛ |
| Straightness |
1.8㎛ |
2.4㎛ |
| Applications |
Photo mask inspection equipment |
|
