Specification
|
axis |
X |
Y |
| Work area |
3,100mm |
2,100mm |
| Guide |
Air bearing |
LM bearing |
| load mass |
400kg |
50kg |
| Speed |
400mm/sec |
|
| Acceleration |
1m/sec² |
|
| Position accuracy(보정후) |
5㎛ |
|
| Repeatability |
±1㎛ |
|
| Option | ||
| Applications |
LCD vision inspection equipment etc. |
|
