Description
Ceramic is superior to granite in terms of straightness, stiffness and water absorption (zero), so that ceramic is more robust against deformation and deterioration. Ceramic air bearing stages are suitable for the equipment requiring high class accuracy.
Specification
|
Axis |
X₁, X₂ |
Y |
| Work area |
800mm |
920mm |
| Guide |
Granite air bearing |
Ceramic air bearing |
| Load mass |
30kg/Z axis |
|
| Speed |
500mm/sec |
|
| Acceleration |
5m/sec² |
|
| Position accuracy(보정후) |
±0.3㎛ |
|
| Repeatability |
±0.1㎛ |
|
| 정지안정성 |
±0.05㎛ |
|
| Applications |
Precision Length Measurement Equipment |
|
