Description
Acu-positioner II series is cost effective system with high performance by applying single motor on the gantry stage structure
Features
- Low cost standard modular structure
- Compact, high stiff and light weight design
Specification
|
Parameter |
Unit |
ACPⅡ400400 |
ACPⅡ500500 |
ACPⅡ600600 |
Remark |
| Motor |
N |
upper axis :JTKL3619(312N) |
coreless |
||
|
lower axis : KTKC5625(690N) |
iron-core |
||||
| Work territory |
mm |
400×400 |
500×500 |
600×600 |
- |
| Load mass |
kg |
20kg |
- |
||
| Solution |
㎛ |
0.1 / 0.5 / 1 |
- |
||
| Position Accuracy |
㎛ |
10 |
after compensation |
||
| Repeatability |
㎛ |
±2 |
- |
||
|
Straightness |
㎛ |
15 |
- |
||
| Flatness |
㎛ |
20 |
- |
||
| Speed |
mm/sec |
2,500 |
maximum |
||
| Acceleration |
m/sec² |
20 |
- |
||
| Static tremor(Jitter) |
㎛ |
0.5 |
resolution 0.1um |
||
