Description
- Stroke : 2,715mm×2,630mm
- Acceleration : 4m/sec²
- Velocity : 1.6m/sec
- Settling Time : 250msec / ±0.5㎛
- Payload : 230kg
Specification
Axis |
X₁,X₂ |
Y₁,Y₂ |
Work area |
2,600mm |
2,300mm |
Guide |
LM bearing |
|
Load mass |
215kg(Head) |
|
Speed |
1.6m/sec |
|
Acceleration |
4m/sec² |
|
Position accuracy(보정후) |
10㎛ |
|
Repeatability |
±1㎛ |
|
Option | ||
Applications |
Laser repair equipment and others |