Description
- Stroke : 2,110mm×1,650mm
- Accuracy : 2㎛
- Repeatability :±1㎛
- Glass lifting & illumination axis(option)
Specification
|
Axis |
X₁, X₂ |
Y |
| Work area |
1,900mm |
1,600mm |
| Guide |
LM bearing |
|
| Load mass |
30kg(Head) |
|
| Speed |
500mm/sec |
|
| Acceleration |
2m/sec² |
|
| Position accuracy (보정후) |
2㎛ |
|
| Repeatability |
±1㎛ |
|
| Option |
Glass lifting & illumination axis |
|
| Applications |
LCD thickness, height measurement equipment, etc. |
|
