Description
- Stroke : 350mm×700mm
- Acceleraton : 10m/sec²
- Velocity : 1.5m/sec
- Accuracy : 3㎛
- Settling Time : 250msec/±0.5㎛
- Payload : 20kg
Specification
|
Axis |
X |
Y |
| Work area |
700mm |
350mm |
| Guide |
LM Bearing |
|
| Load mass |
20kg(Head) |
|
| Speed |
1.5m/sec |
|
| Acceleration |
10m/sec² |
|
| Position accuracy(보정후) |
3㎛ |
|
| Repeatability |
±1㎛ |
|
| Option | ||
| Applications |
Semiconductor repair equipment and others |
|
