Description
- Resolution : 0.1㎛ / 0.5㎛ / 1㎛
- Stroke : 20mm ~ 120mm
- Jitter(in-position stability) below 50nm and quick response time
- Minimal backlash by use of a full closed-loop control of linear encoders
- Component for inspection systems of optical parts, optoelectronic parts, bio materials, printed circuit boards and mobile phones
Specification
|
Model |
JSAH20 |
JSAH40 |
JSAH60 |
JSAH80 |
JSAH100 |
JSAH120 |
|
| Performance Parameters |
Units |
||||||
| Normal Load Capacity |
kg |
5 |
5 |
5 |
5 |
5 |
5 |
| Average Acceleration *Note1 |
m/sec² |
2.5 |
2.5 |
2.5 |
2.5 |
2.5 |
2.5 |
| Max Velocity *Note1 |
m/sec |
0.2 |
0.3 |
0.35 |
0.4 |
0.5 |
0.55 |
| Straightness |
㎛ |
3 |
3 |
3 |
3 |
4 |
4 |
| Flatness |
㎛ |
6 |
6 |
8 |
8 |
10 |
10 |
| Positional Accuracy *Note2 |
㎛ |
3 |
3 |
4 |
4 |
5 |
5 |
| Bi-directional Repeatability *Note2 |
㎛ |
±1 |
±1 |
±1 |
±1 |
±1 |
±1 |
| Total Weight |
kg |
1.8 |
2 |
2.2 |
2.4 |
2.6 |
2.8 |
| Mover Weight |
kg |
0.7 |
0.8 |
1.0 |
1.1 |
1.3 |
1.4 |
Measured at the mover center with no load (Temp. 20±2˚C).
*Note1 : Encoder resolution : 1um *Note2 : Encoder resolution : 0.1um
※ Acceleration, Velocity, Accuracy, Repeatability depend upon encoder resolution
