Description
Improvement in reducing cost, weight and delivery time is achieved by the development of stages without granite base. It is suitable for repairing or inspection equipment requiring high speed operation
Features
- High stiff & low-resonance iron pipe frame designed by use of FEM analysis
- Improved controllability based on new control algorithm suppressing vibration
- High stiff & light weight composite material upper beam available (Optional)
Specification
|
Parameter |
Unit |
X₁, X₂ |
Y |
Remark |
| Motor |
- |
JTKCA050 |
JTKCA0650 |
Iron-core type |
| Sizw |
mm |
3,720 |
3,000 |
Gen. 8 |
| Work area |
mm |
2,700 |
2,400 |
Gen. 8 |
| Load mass |
kg |
- |
140 |
- |
| Position accuracy |
㎛ |
2 |
2 |
after compensation |
| Repeatability |
㎛ |
±1 |
±1 |
- |
Straightness
|
㎛ |
20 |
30 |
- |
| Flatness |
㎛ |
40 |
40 |
- |
| Yaw |
arcsec |
20 |
20 |
- |
| pitch |
arcsec |
20 |
20 |
- |
| Right angle |
arcsec |
- |
±5 |
- |
| Speed |
mm/sec |
1,600 |
1,600 |
maximum |
acceleration
|
m/sec² |
5 |
5 |
average |
| Speed ripple |
% |
±0.2/100 |
±0.2/100 |
at 100mm/sec |
| Stabilization time |
msec/lpos band(㎛) |
650/±0.5 |
250/±0.5 |
200mm move at 400mm/sec |
| Static tremor(Jitter) |
㎛ |
±0.1 |
±0.1 |
- |
