Specification
|
Axis |
X₁, X₂ |
Y |
| Work area |
2,100mm |
400mm |
| Guide |
Air bearing |
|
| load mass |
250kg |
|
| Speed |
800m/sec |
|
| Acceleration |
2m/sec² |
|
| Position accuracy(보정후) |
4㎛ |
|
| Repeatability |
±1㎛ |
|
| Option |
Theta axis |
|
| Applications |
LCD pattern inspection equipment etc |
|
