Description
- Dimension : 3,800mm×4,300mm
- Stroke : 2,510mm×2,590mm
- Repeatability : ±1㎛
Specification
|
axis |
X₁~ X₃ |
Y₁~ Y₄ |
| Work area |
2,600mm |
2,600mm |
| Guide |
LM bearing |
|
| Load mass |
30kg(Head) |
|
| Speed |
500mm/sec |
|
| Acceleration |
1m/sec² |
|
| Position accuracy (보정후) |
8㎛ |
|
| Repeatability |
±1㎛ |
|
| Option | ||
| Applications |
LCD Auto Prober Etc |
|
