Overview
Korea Vacuum Tech, Ltd. (KVT) is proud to introduce the latest revolutionary
addition to our product line, the Intelsi-S, small vacuum system. Deposite its compact
convenient size, easy operation and affordability, functionality is in no way sacrificed.
The modular design of the Intelsi-S makes it highly configurable to meet specific
customer needs and numerous stock options are also available. A fully automated
Laptop PC helps round out this extremely usable yet robust diminutive package.
Advantages
≻ Easy to operate
≻ No cooling required
≻ Precise reproducible coating
≻ Fully adaptable to a wide range of specimens
≻ Easy loading and unloading of specimens
Features
≻ Extreme versatility
≻ High capacity vacuum pumping
≻ Fully automated PC control
≻ Capable of producing very thin resultant films
≻ Suitable for reactive gas deposition (O2, Ne etc.)
Applications
≻ Gold coating for SEM
≻ Metal Deposition such as Al, Au and so on
Specifications
| ITEM | Intelsi – S | Intelsi - ST |
| System Dimensions | 501mm(W) x 540mm(D) x 421mm(H) – 19.7” x 21.3” x 16.6” | |
| Weight | 35kg (77.2 lb) | |
| Electrical / Compressed Air | 110V/220V, Single Phase, 50/60Hz / 6~7kfg/cm2 | |
| Target Size | 2 inch (50.8mm) diameter | |
| Pumping Capability | Rotary Pump | Rotary & Turbo Molecular Pump |
| Gas Supply Unit | Metering Valve | |
| Power | DC Power Supply | |
| Ultimate Pressure | Less than 5.0E-3Torr | Less than 5.0E-6Torr |
| Operation | Auto pumping, Auto process and auto vent using PLC & Simple buttons | |
| Deposition Source | Sputtering Cathode 1EA | |
| Vacuum Gauge(Reading Range) | ATM to 5.0E-3Torr | ATM to 5.0E-6Torr |
| Throttle Valve | N/A | On/Off type |
| Film Thickness Uniformity | Less than ±5% | |
| Optional Items | Substrate rotation & Z-motion, Substrate Heating, MFC | |
