Korea Vacuum Tech

Overvie

An evaporator uses an electric resistance heater or high-energy beam to melt material

and to raise its vapor pressure to a useful range. This process takes place in a high

vacuum state to allow the vapor to reach the substrate without reacting with or

scattering against other gas-phase atoms in the chamber while reducing the

incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series

evaporation systems are capable of fabricating multi-layer thin films by applying this

co-deposition process.

Features 

≻ Excellent Thickness Uniformity

       The KVE Series IBAD E-Beam Evaporator System provide excellent thickness uniformity of

       resultant films. if you deposit the thin film under same conditions, you will get a thin films of

       same characteristics.

≻ Assist the deposition by using ion beam

        The systems have the E-beam unit and Ion beam unit. Ion beam unit assists to deposit the

        thin film of high density.

≻ Always maintain high vacuum degree in process

        The systems have a process chamber and a loadlock chamber(option). Loadlock

         chamber(option) is used for sample loading. So process chamber is always maintained high

         vacuum state.