Korea Vacuum Tech

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. KVE-TG Series is consisted of deposition

system with glove box system. These systems can prevent the oxidation of sample from external air.

If you use the mask when you deposit the thin film, you can make the device without venting the chamber.

Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.

Features

≻ Mixing source

The system has multi thermal source. It can use the organic source with the metal source. Also can be possible that is co-deposition.

≻ Multi-Layer Deposition

Multiple source assemblies provide for sequential multi-layer or complex alloy deposition In Situ.

≻ Make the complete sample at once.

The system has the mask changer. So you can get the complete sample without venting the chamber. It has advantage that reduce the chamber pumping time and prevent the oxidation of sample.

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. KVE-TG Series is consisted of deposition

system with glove box system. These systems can prevent the oxidation of sample from external air.

If you use the mask when you deposit the thin film, you can make the device without venting the chamber.

Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.

Features

≻ Easy sample loading

The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.

≻ Prevent the oxidation of sample

When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. KVE-TG Series is consisted of deposition

system with glove box system. These systems can prevent the oxidation of sample from external air.

If you use the mask when you deposit the thin film, you can make the device without venting the chamber.

Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.

Features

≻ Easy sample loading

The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.

≻ Prevent the oxidation of sample

When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. KVE-TG Series is consisted of deposition

system with glove box system. These systems can prevent the oxidation of sample from external air.

If you use the mask when you deposit the thin film, you can make the device without venting the chamber.

Also if you enter the deposition condition to recipe, you will always get the thin film of same characteristic.

Features

≻ Easy sample loading

The system is installed in an expanded form of the process chamber which placed above the main process chamber. Therefore it doesn’t need the loading arm. So you can make a sample loading very simply.

≻ Prevent the oxidation of sample

When the sample is taken out of the chamber, it is immediately connected to the glove box, protecting the sample from oxidation.