Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item.
FEATURES
≻ Excellent thin film uniformity
≻ Vacuum compatible to 5.0E-7Torr
≻ Rotate the substrate.
≻ Stability rate
≻ Multi-layer processing
≻ Easy Manipulation
Specifications
ITEM | Specifications |
Process Chamber | Stainless steel |
Vacuum Pumping Station | TMP / Cryo pump |
Substrate Unit | Rotation / Heating / Cooling |
Sample Size | 4” ~ 12” |
Power Supply Unit | 10V,300A / 10V,100A |
Source Type & Number | Boat, Crucible / up to 8 |
Process Control Type | Auto |
Film Thickness Uniformity | < ±5% |
Ultimate Pressure | < 5.0E-7Torr |
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item.
FEATURES
≻ Excellent thin film uniformity
≻ Vacuum compatible to 5.0E-7Torr
≻ Rotate the substrate.
≻ Stability rate
≻ Multi-layer processing
≻ Easy Manipulation
Specifications
ITEM | Specifications |
Process Chamber | Stainless steel |
Vacuum Pumping Station | TMP / Cryo pump |
Substrate Unit | Rotation / Heating / Cooling |
Sample Size | 4” or more |
Power Supply Unit | 10V,300A / 10V,100A |
Source Type & Number | Boat, Crucible / Two or more |
Process Control Type | Semi-auto |
Film Thickness Uniformity | < ±5% |
Ultimate Pressure | < 5.0E-7Torr |
