The OAI Model 5000E Large Area Mask Aligner is an advanced, high-performance, fully-automated mask Aligner and exposure tool that delivers ultra precise, Topside, sub-micron alignment and resolution for large, flat panel applications.
Its flexible design allows printing on various substrates - round or square - up to 300mm or 20”x20”.
The exposure system is compatible with photo resist in Near, Mid, or Deep UV range, and features computer-controlled LED microscope lighting for viewing in less-than-ideal viewing environments.
