1. WAFER TRANSFER EQUIPMENT HIGH LIGHT(BATCH TYPE)
•High throughput and reliable transfer for 25 or 50 wafers.
•Cater for 4", 5" , 6" & 8" wafers & thickness 6 mils to 8 mils & above.
•Highest Productivity per floor area usage.(HIGH UPEH)
•Wafer transfer from Cassette to Quartz , Quartz to cassette.