Product Description
3. RETICLE TRANSFER EQUIPMENT HIGH LIGHT
•High throughput and reliable transfer for reticle.
•Cater for Nikon & ASML case.
•Smallest foot print
•Highest Productivity per floor area usage.
•Reticle transfer from Nikon case to ASML case, ASML case to Nikon case.
•Protect from contamination
•Special transfer robot is designed to minimize the particle generation.
