Product Description
Clean the needs of the local height of the 300mm (or 200mm) Wafer process applied within the system of local clean process that can occur during transport and to improve quality by reducing the Particle, FOUP Opener and air carrier Robot, Pre-Aligner uses 200 & 300mm Wafer Handling and Sorting for the fully automated equipment.
Specification
| Item | Description | Rmk | |
| MODEL | ET300-2X2SS | ||
| Application | Wafer size | 12 inch | |
| Robots | Vacuum Grip type Dual Wrist Single Arm Robot | ||
| Aligner | Vacuum Grip type Aligner Through Beam Type Mapping Sensor On FIMS port | ||
| Electric control | Processing | Visual C | |
| Productivity | Normal | 12inch : 400 wafer/hr | Window base |
| 12inch : 180 wafer/hr | With Wafer reading | ||
| Dimension | 1567(L) x 2123(W)x 1880 (H) mm | ||
| Power | 220V AC 1- P 50/60Hz | ||
| Vacuum | - 80 KPA [ -24 ″Hg ](Min) - OD 8mm Tubing | ||
Feature
Robots and Aligner
- Vacuum Grip type Dual Wrist Single Arm Robot
▬ Vacuum Grip type Aligner Through Beam Type Mapping Sensor On FIMS port
- Doubled & Crossed wafer check u 15 ” TFT LCD monitor
- W ith Mouse & Keyboard High resolution OCR camera for ID reading
- Back side ID reading ( Front side ID reading )
▬ OCR ( M12 , T7 ) u FIMS Port - 3 Ports ( FOUP Opener ) + 1 Port( FOSB & FOUP Opener)
( FOSB door should be opened by operator ) - 4 color signal tower lamp - with Buzzer u
Safety feature
- Vacuum sensors on Robot, Aligner ▬ Wafer protrusion sensor - Cassette presence sensor
- Back-up Vacuum Tank
- EMO Switch u
Software
Semi standard oriented S/W feature
- Simple and User friendly Designed GUI - All information of any cassettes on stages are displayed.
- splitting, compression , merging, transfer functions …
- Real time Sorting process status can be displayed. - Real images of wafer Ids can be viewed ( in case of Wafer ID reader function )
- User configurable setup information u Performance Data Throughput Max 400 wafers/hr ( Only Simple Transfer ) Max 180 wafers/hr ( with ID reading )
Uptime ≥ 99 %
MTBF ≥ 1,000 hours
MTTR ≥ 0.5 hours
