Product Description
This machine cleans the wafer by removing the flux on the wafer(300mm) bumped with balls.
It cleans the wafer using DI water and high pressure spray, transfers it on the silicone coated SUS Inlet Conveyor belt automatically.
Specification
| Model | WEFC-2500 W |
| Wafer Size | 300 mm Wafer |
| Conveyor speed | 100 ㎜ /min ± 300 ㎜ /min |
|
Di Wash Pressure zone |
TOP 3 ~6 ㎏ / ㎠ BOTTOM 1~3 ㎏ / ㎠ |
| Air Blow Zone |
TOP : 500 ～ 10 00mmH2O (7.5 HP) BOTTOM : 300 ～ 8 00mmH2O (5 HP) |
| Hot Dry Zone | 100℃±10℃ |
| Dimension(D.I) | 2,050(L) × 1,450(W) × 2,000(H) mm |
| Inlet conveyor belt (D.I) | 2,800(L) × 450(W) mm {Silicon Coating} |
| Power | AC380 Ｖ ø 3 200A 60 ㎐ |
Feature
- User Management System for easy transport
- DI water purity Check System
- Top pressure SYSTEM
- Reduces excessive water usage.
- Open the front panel
