Product Description
DL3000 is a Semiautomatic system which is designed to De- laminate tape (UV or Non UV) which is laminated on wafer without any Wafer damage.
Specification
Model | SM - DL3000 |
Wafer Size | 12 Inch (allowable 6,8 ") |
Dimension | 800(L) *500(W)*500(H) mm |
Power | 220V AC 1P 50/60 Hz |
Weight | 25Kg |
Air | 5 ~ 7 kg/㎠ |
Feature
- 12” Wafer Capability (allowable 6”,8” (option)
- Manual tape feeding
- Non UV & UV Tape allowable.
- Wafer vacuum holding by metal chuck
- (6”,8”and 12”individual vacuum control)
- Ionizer
- UV Irradiator Unit (option)