5. WAFER EFEM EQUIPMENT HIGH LIGHT
•High throughput and reliable transfer for wafers(6,8)
•EFEM is designed to minimize the particle generation.
•Minimized foot print, vibration, noise
•Integrating a pre-aligner with a clean robot
•High throughput
•Highest Productivity per floor area usage
•Ulpa filter, barcode reader, ionizer are attached.
•OEM EFEM solution for 4, 5, 6, 8, 12inches
