LOGO

ASFLOW

Semi conductor equipment and High purity valve for high purity gas line manufacturer, Fitting, Pipe, Tube, Valve, Regulator and more
Name

IGS Gas Filter

Model FLT-IGS Series
Series Filter & Diffuser
Product Description

 ASFLOW IGS Gas Filter FLT-IGS Series

SIZE CONNECTION
11 1.125″ W W-Seal
15 1.5″ C C-Seal

 

Specifications

Removal Rating ≥0.0025µm
Retention Greater than 99.9999999% Removal of all particles down to 0.0025µm
Rated flow @ 109 30 SLPM
60 SLPM
120 SLPM
Materials Filter element 316L Stainless steel, Hastelloy C276
Electro polished housing SM/DM 316L Stainless steel, Hastelloy C22
Element Operating Conditions Maximum inlet pressure 0.98 MPa (10kgf/cm2) at 20°C
Maximum differential pressure 0.7 MPa (7kgf/cm2) at 20°C
Maximum operating temperature 460°C (Inert gas)
Helium Leak Rating 1 x 10-9 atm cc/sec
Surface Finish Interior ≤ Ra 5μin

 

Dimensions

Size Seal Type Part Number A/mm B/mm C/mm D/mm H/mm
1.125″ W-Seal IGS 11W-30 20 21.8 28.6 21.5 45
IGS 11W-60 20 21.8 28.6 21.5 58
C-Seal IGS 11C-30 21.8 21.8 28.6 21.5 45
IGS 11C-60 21.8 21.8 28.6 21.5 58
1.5″ W-Seal IGS 15W-60 26 30 39 27.5 62
IGS 15W-120 26 30 39 27.5 96
C-Seal IGS 15C-60 30.2 30.2 39 27.5 62
IGS 15C-120 30.2 30.2 39 27.5 96

ASFLOW IGS Gas Filter FLT-IGS Series 1

 

Product Dimension (mm)

ASFLOW IGS Gas Filter FLT-IGS Series 2

Products of ASFLOW