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Semi conductor equipment and High purity valve for high purity gas line manufacturer, Fitting, Pipe, Tube, Valve, Regulator and more
Name

Hastelloy Gas Filter

Model FLT-HF Series
Series Filter & Diffuser
Product Description

ASFLOW Hastelloy Gas Filter FLT-HF Series

 

 

SIZE CONNECTION
04 1/4″ MV Male
06 3/8″ LOK Lok
08 1/2″ BW Butt Weld
12 3/4″    

 

Specifications

Removal Rating ≥0.0025µm
Retention Greater than 99.9999999% Removal of all particles down to 0.0025µm
Rated flow @ 109 15 SLPM
50 SLPM
150 SLPM
300 SLPM
Materials Filter element Hastelloy C-276
Electro polished housing Hastelloy C-22
Element Operating Conditions Maximum inlet pressure 21 MPa (210kgf/cm2) at 20°C
Maximum differential pressure 15 MPa (153kgf/cm2) at 20°C
Maximum operating temperature 460°C (Inert gas)
Helium Leak Rating 1 x 10-9 atm cc/sec
Surface Finish Interior ≤ Ra 5μin

 

Dimensions

ASFLOW Hastelloy Gas Filter FLT-HF Series 1

Part No. A/mm B/mm C/mm D/mm
HF15-04MV 84 15.5 22 20
HF15-04LOK 73 10 22 20
HF50-04MV 84 15.5 22 20
HF50-04LOK 73 10 22 20
HF150-04MV 84 15.5 37 35
HF150-04LOK 73 10 37 35
HF300-04MV 127 1.5 37 35
HF300-04LOK 116 10 37 35
HF300-08MV 136 19 37 35
HF300-08LOK 122 12 37 35

 

Product Dimension (mm)

ASFLOW Hastelloy Gas Filter FLT-HF Series 2

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