SD CVD (CVD&ALD)

Space Divided Chemical Vapor Deposition

•World’s First and Best Technology
•The world’s highest market share

[KEY BENEFITS]

- World’s first and best semi-batch equipment to maximize production per unit hour
- Form high-quality/high-productivity thin film at low temperature
- Process technology optimized for ultra-low temperature

[KEY APPLICATIONS]

- High-K
- Metal
- Ultra Low Temperature SiO