SD CVD (CVD&ALD)
Space Divided Chemical Vapor Deposition
•World’s First and Best Technology
•The world’s highest market share
[KEY BENEFITS]
- World’s first and best semi-batch equipment to maximize production per unit hour
- Form high-quality/high-productivity thin film at low temperature
- Process technology optimized for ultra-low temperature
[KEY APPLICATIONS]
- High-K
- Metal
- Ultra Low Temperature SiO