OLED Encapsulation(CVD&ALD)

Organic Light Emitting Diode

•World’s first and best large-area mass-production ALD
•New concept zero-damage plasma technology
•High-quality thin film forming technology at low temperature

[KEY BENEFITS]

- CVD/ALD two-way encapsulation system suitable for large-area encapsulation
- Large-area encapsulation using new concept plasma technology for the first time in the world TSD– CVD/ALD

[KEY APPLICATIONS]

- Encapsulation (SiO / SiOX / SiN / Al2O3)
- Barrier (SiO / SiOX / SiN / Al2O3)