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Jusung Engineering Co. , Ltd.

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IMG
Name

IGZO MOCVD
Series Display Equipment
Product Description

IGZO MOCVD

Indium Gallium Zinc Oxide Metal Organic Chemical Vapor Deposition

•World’s first CVD type IGZO equipment
•The world’s highest mobility

[KEY BENEFITS]

- Source (In, Ga, Zn) content adjustable
- Mobility > 90
- In-System GI / IGZO / ESL

[KEY APPLICATIONS]

- IGZO
- AlO / SiO / SiN 
 

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