Jusung Engineering Co. , Ltd.

Semi conductor, Display, Solar cell and more

Name	LED GaN MO CVD / SiC EPI
Series	Lighting Equipment

Product Description

Metal Organic CVD for Gallium Nitride and Related Materials

•World’s highest productivity – Large batch size ( 2”x102, 4”x28 )
•Excellent Temperature uniformity
•Excellent Gas flow uniformity

[KEY BENEFITS]

- New concept temperature uniformity adjustment
- Unique gas distribution
- Low CoO

[KEY APPLICATIONS]

- LED(GaN on Sapphire / GaN on Si)
- Power Device(GaN , SiC)

* LED : Light Emitting Diode

Products of Jusung Engineering Co. , Ltd.

LED GaN MO CVD / SiC EPI