Crystal form (PE CVD / RIE)

•PE CVD for antireflection coating (ARC)
•Dry etching device for texturing (RIE) 
•Highest efficiency / lowest cost system

[KEY BENEFITS]

- High-efficiency and high-productivity system
- Improved solar cell conversion efficiency
- Easy Control Surface Reflectance 
- Excellent NanoTexture Shape, Passivation
- Process technology optimized for low temperature

[KEY APPLICATIONS]

- PE CVD(SiN / SiO / SiON / AlO)
- RIE(Plasma Texturing Etching)