Product Name : REVIEW SEM

Features : Project Development Together with SERON technology

Features

SERON Technology's "Custom Fit Product" will implement.  
Details specification is designed and implemented to the customer's personalized system.

- 60o Conical Optic Lens (For Large Sample Review) 

- LaB6 or FE-SEM Optics for long time review under UHV 

- High speed scan speed (Live Image @1024X768)

- High Pixel resolution (8192X6144)

- Intuitive Multi-Tasking Window 

- Powerful Image Process & Measurement Tool(AOI) 

Specifications

Customizing Product

1. Review SEM based on LaB6 Gun ;

Seron technology offers LaB6 electron source as an review system, which can be classified as somewhere in-between the FEG emitter and tungsten hair-pin filament.
The benefit of LaB6 is a relatively stable electron-emitting source compared to those of FE SEMs, providing higher currents at lower cathode temperatures compared to tungsten emitters.
This means greater brightness,  a reasonably improved resolution over the whole range of accelerating voltages and  a longer cathode lifetime.
Due to the higher emission current, the LaB6 emitter is the right choice for analytical applications where large beam currents are needed.  

2. Review SEM based on FE-SEM Optics

Seron technology also offers Schottky FEG emitter source for high resolving image acquisition.
Especially, it is used for various field like semiconductor, flat panel display, solar cell and etc.
We are supporting review system through cooperation with domestic and overseas companies as follows ;  
- Customized E-Beam Optic & Chamber
- Possible Auto-Loader & Stocker for Transfer System 
- Precision Stage with multiple Axis Drive
- Nano Manipulator & Robotics