Product Name : NANO MANIPULATOR (FINGER)
Features : 1) Material Research 2) Forensics / Crime research
Technology and Certification : Certificates
Features
Apply for the Advanced Nano Manipulator of Switzerland & Germany
Are you working in the field of …
1) Material Research
2) Forensics / Crime research
3) Dimensional Quality Control
4) High Resolution Analysis
5) Tribology in-SEM Nanofabrication
6) Semiconductor development and production
Specifications
Target specifications
1) Cartesian movement of independent axes (important for an easy operation)
2) Absolute positioning vertical axis (in the "blind" direction of a SEM)
3) Optional position sensors also for XY axes, repeatability better 60 nm
4) Small design (to fit in any chamber)
5) Many options to fix tools easily
6) Robust (crash resistant)
7) Movable (by hand or by collisions) without loosing the position information
8) Pure piezo drive from nm to cm stroke (no electro motor coupled with a piezo)
9) Resolution of single Nanometers
10) A real fine positioning stroke of at least 1 micron
11) Vibrations of the whole manipulator below 10 nm
12) Stroke selectable in a range between 5 and 50 mm
13) Modular design to choose size and stroke for each axis
14) Stationary assembly => sample can move independent from manipulator
15) "Micro-Jackhammer" mode (with e.g. 50 G accelerations) to process material
16) Network Electronics with external intelligence for compatibility with any SEM
