Product Name : Ion Sputter Coater
Features : Ion Sputter Coater(Range of economic co-printer devices)
Features
Ion Sputter Coater (Range of economic co-printer devices)
1) Flip-Top Target head for easy to access to speciment stage.
2) Sputter : Single Top Electrode Discharge System.
3) Easy to operate Pirani type Vacuum gauge with meter.
4) High speed coating for reduce heat damage to sensitive specimens.
5) All shapes, size coating uniformly
6) Compact design maximized limited space.
7) Various Models with different targets.
Specifications
Ion Sputter Coater (Product by Korea)
1) Sputtering System : Top Electrode Discharge System
2) Working Pressure : ~10 -1 Pa (~10 -3 Torr)
3) High Tension power : DC 0 ~ 1.2 kV (Continuously variable)
4) Target : 57mm dia Au disk (Standard) or Carbon
5) Vaccum Monitor : Pirani sensor control
6) Time unit range : 0.1sec, sec, min, hour
7) Vent gas : Air / Ar / N
8) Power : 220VAC, single Phase
9) Dimension(mm) : 300(H)X430(W)X320(D) ; Chamber 120(Dia)X110 (H)
10) Weight (kg) : 15
11) Vaccum Pump : 100l