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System Engineering Mega Solution

Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
Name

OMEGA S

Model OMEGA S
Series Semiconductor Equipment
Product Description

Overview

The “All in one” platform design photo for H-SOH Process. 


Feature

High Productivity

- Reduce Footprint and improved Throughput with a new SOH-exclusive Platform

Minimize Defects

- 2-block Vertical Robot System and optimized Environmental Control
- Contamination Prevention ni Baking Unit by supplying the Clean-air and improving Exhaust System
- Improved Air Flow Control System for Bake Chamber

Easy Maintanance

- Application of Equipment Condition Analysis and Self-diagnostic Function
- Improving Accessibility for easier Maintenance and Reducing MTBR