| Name |
Combo Stocker |
| Model | Combo Stocker |
| Series | Line Automation |
Overview
Storage and transferring system for Reticle and Pod with N2 Purge System
Feature
- High Capacity (RSP-150, 6”Reticle)
. Reticle Pod : 68 EA
. Bare Reticle : 1,452 EA
- High Clean Class System
. Pod area : SEC Class 1000
. Bare area : SEC Class 1
- Transfer Interface : OHT
Display Equipment
Coater Full Line
Display Equipment
Z Printing
Display Equipment
Etcher/Stripper
Display Equipment
Cleaner
Line Automation
OHT System
Line Automation
Combo Stocker
Line Automation
Stocker
Semiconductor Equipment
BLUEICE SPM
Semiconductor Equipment
IRIS 12B
Semiconductor Equipment
OMEGA K
Semiconductor Equipment
BLUEICE PRIME
Semiconductor Equipment
IRIS PRIME
Semiconductor Equipment
MICHELAN O2
Semiconductor Equipment
MICHELAN C3
Semiconductor Equipment
MSW9000
Semiconductor Equipment
SW6000Plus
Semiconductor Equipment
SEMPRO
Semiconductor Equipment
SEMBOND
Semiconductor Equipment
TACHYON
Semiconductor Equipment
STH-5700F
Semiconductor Equipment
IP-300H
Semiconductor Equipment
SDB-3000MD Plus
Semiconductor Equipment
OMEGA S
Semiconductor Equipment
LOTUS
