| Name |
IRIS PRIME |
| Model | IRIS PRIME |
| Series | Semiconductor Equipment |
Overview
Single Wafer Wet Clean/PR Strip for High Grade Process
Feature
Process Performance
- High Grade Process (26nm)
Productivity / Hardware
- Contamination Free Clean by NIC Bowl
- New S2-Aerosol : High-Velocity / Uniformity Droplet
- Smart System : APAC (Auto Flow Control), Smart Equipment Analysis System, Auto Inspection System
- Energy Efficiency Rating : Class 1
Display Equipment
Coater Full Line
Display Equipment
Z Printing
Display Equipment
Etcher/Stripper
Display Equipment
Cleaner
Line Automation
OHT System
Line Automation
Combo Stocker
Line Automation
Stocker
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LOTUS
