| Name |
BLUEICE SPM |
| Model | BLUEICE SPM |
| Series | Semiconductor Equipment |
Overview
The 300mm single wafer processing equipment that is used for post CMP clean, PR strip, ashingless PR strip and metal removal processes.
Feature
Process Performance
- High Temperature SPM Process over 150℃
- PR Strip, Post CMP Clean, Metal Clean and etc.
Productivity / Hardware
- Contamination Free Clean by NIC Bowl
- H2SO4 Recycle System
- Energy Efficiency Rating : Class 1
Display Equipment
Coater Full Line
Display Equipment
Z Printing
Display Equipment
Etcher/Stripper
Display Equipment
Cleaner
Line Automation
OHT System
Line Automation
Combo Stocker
Line Automation
Stocker
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LOTUS
