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System Engineering Mega Solution

Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
Name

BLUEICE PRIME

Model BLUEICE PRIME
Series Semiconductor Equipment
Product Description

Overview

The Single Wafer Wet Clean/PR Strip System for developing System LSI’s L1Xnm< device.


Feature

Process Performance
 
- High Grade Process (19nm)
- Defect Free Physical Cleaning

Productivity / Hardware

- Contamination Free Clean by NIC Bowl
- Leaning Free by CDA System
- SF-Aerosol : High-Velocity / Uniformity Droplet
- Smart System : APAC (Auto Flow Control), Smart Equipment Analysis System, Auto Inspection System