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System Engineering Mega Solution

Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
Name

LOTUS

Model LOTUS
Series Semiconductor Equipment
Product Description

Overview

Single Wafer Wet Clean/PR Strip Equipment for High Grade Process


Feature

Process Performance

- High Speed Robot Technology
- High Grade Process (19nm)
- High Temperature SPM Process Over 150℃

Productivity / Hardware

- Customized Chamber Configuration : 6, 9 or 12 Chambers
- State of the art Particle Improvement Technology
- User-Convenience (Vision Inspection, Tool Matching)
- Equipment Analysis and Diagnosis System