Overview
ㆍUse of gas to dispose of flammable and other gases used in semiconductor, LCD, LED, OLED and SOLAR processes, heating gas sufficiently to temperatures equal to or higher than their spontaneous ignition temperature
ㆍArea of application Semiconductor, LCD, OLED and Solar processes that use combustible gases.
Characteristics
ㆍHeater housing & Reactor corrosion prevention
ㆍStable temperature control of reactor parts
ㆍNox and CO emissions reductions
ㆍMaterial used for SiC heater protective pipes : INCONEL
ㆍSupply of CDA for oxidizing reaction
ㆍSteam injection (option)
Size
ㆍISIS-I
720(W) x 860(D) x1750(H)
ㆍISIS-II
840(W) x 1000(D) x1750(H)
Utility
| Item | Type | Connection Type | |
| ISIS-I | ISIS-II | ||
| Electricity | -- | 208VAC 3Phase 75A | 208VAC 3Phase 125A |
| CDA | 5 ~ 6.5 kg/㎠ | ½” SS compression | ¾” SS compression |
| GN2 | 3 ~ 6 kg/㎠ | ⅜” SS compression | ⅜” SS compression |
| City Water | 3 ~ 6 kg/㎠ | ½” SS compression | ¾” SS compression |
| Cooling Water | 3 ~ 6 kg/㎠ | ½” SS compression | ¾” SS compression |
| Drain Water | Gravity | 40A PVC union | 40A PVC union |
| Pump | 20A PVC union | 15A PVC union | |
| Gas Exhaust | -50 ~ -80㎜H2O | MF100 Flange | MF125 Flange |
| Cabinet Exhaust | -30 ~ -60㎜H2O | MF100 Flange | MF100 Flange |
| NaOH (option) | 0.5 ~ 1 kg/㎠ | 1 ½” PVC double containment | |
