Overview
ㆍIt applies the format of treating the gas generated after having been bused in the semiconductor process by passing the gas through flames with system that maximized the CO and Nox treatment efficiency through multi-staged combustion.
ㆍArea of application Preliminary processes of semiconductor and others
Characteristics
ㆍMinimization of Nox and CO emissions through multi-stage combustion
ㆍHigh gas treatment efficiency
ㆍOperation of energy saving mode
ㆍAutomatic cleaning device (option)
ㆍAir supply through fan (option)
ㆍFan installed at discharge end (option)
ㆍSelect between single and dual mode
Size
ㆍSingle
850(W) x 1035(D) x1880(H)
ㆍDual
1585(W) x 1085(D) x 1880(H)
Utility
| Item | Type | Connection Type | |
| Single | Dual | ||
| Electricity | 208VAC 3Phase 20A | 1KW | 2KW |
| LNG | 0.3 ~ 1.0 kg/㎠ | ½” VCR | ½” VCR |
| O2 | 3 ~ 4 kg/㎠ | ½” SS compression | ½” SS compression |
| CDA | 5 ~ 6.5 kg/㎠ | ½” SS compression | ¾” SS compression |
| GN2 | 3 ~ 6 kg/㎠ | ½” SS compression | ½” SS compression |
| City Water | 3 ~ 6 kg/㎠ | ½” SS compression | ¾” SS compression |
| Cooling Water | 3 ~ 6 kg/㎠ | ½” SS compression | ¾” SS compression |
| Drain Water | Acid Drain | 15A PVC union | 20A PVC union |
| Gas Exhaust | -50 ~ -80㎜H2O | MF100 Flange | MF100 Flange |
| Cabinet Exhaust | -30 ~ -60㎜H2O | MF100 Flange | MF100 Flange |
| NaOH (option) | 0.5 ~ 1 kg/㎠ | 1 ½” PVC double containment | |
Overview
ㆍIt is a format of treating the combustible and other gases used in the semiconductor, LCD, LED, OLED, SOLAR process by using Heater. It employs the system of sufficiently heating the gases to temperature higher than their natural ignition point for treatment.
ㆍArea of application Preliminary processes of semiconductor, LCD and others
Characteristics
ㆍHigh equipment operation ratio
ㆍLow Nox and CO through multi-stage combustion
ㆍHigh gas treatment efficiency
ㆍOperation of energy saving mode
ㆍAutomatic cleaning device (optional)
ㆍAir supply through fan (option)
ㆍFan installation at discharge end (optional)
ㆍSelect between single and dual mode
Size
ㆍSingle
940(W) x 1200(D) x1950(H)
Utility
| Item | Type | Connection Type | |
| Single | |||
| Electricity | 208VAC 3Phase 20A | 1KW | |
| LNG | 0.3 ~ 1.0 kg/㎠ | ½” VCR | |
| O2 | 3 ~ 4 kg/㎠ | ½” SS compression | |
| CDA | 5 ~ 6.5 kg/㎠ | ¾” SS compression | |
| GN2 | 3 ~ 6 kg/㎠ | ½” SS compression | |
| City Water | 3 ~ 6 kg/㎠ | ½” SS compression | |
| Cooling Water | 3 ~ 6 kg/㎠ | ¾” SS compression | |
| Drain Water | Acid Drain | 15A PVC union | |
| Gas Exhaust | -50 ~ -80㎜H2O | MF200 Flange | |
| Cabinet Exhaust | -30 ~ -60㎜H2O | MF100 Flange | |
| NaOH (option) | 0.5 ~ 1 kg/㎠ | 1 ½” PVC double containment | |
