Overview
ㆍSystem of treating gases generated from the semiconductor, LCD, LED, OLED and SOLAR process by generating high temperature of more than 2000℃ by using DC Arc Jet Plasma
ㆍArea of application Preliminary processes of semiconductor
Characteristics
ㆍReactor & Plasma Torch corrosion prevention
ㆍHigh-temperature, high efficiency ARC Plasma flame
ㆍEnergy savings mode (Tool interface run mode)
ㆍDesign optimizations for convenience of maintenance and servicing
Size
ㆍ850(W) x 895(D) x1700(H)
Utility
| Item | Type | Connection Type | |
| DURIAN | |||
| Electricity | 208VAC 3Phase 20A | 13KW | |
| CDA | 5 ~ 6.5 kg/㎠ | ½” SS compression | |
| GN2 | 3 ~ 6 kg/㎠ | ½” SS compression | |
| City Water | 3 ~ 6 kg/㎠ | ½” SS compression | |
| Cooling Water | 3 ~ 6 kg/㎠ | ½” SS compression | |
| Drain Water | Gravity | 40A PVC union | |
| Pump | 15A PVC union | ||
| Gas Exhaust | -50 ~ -80㎜H2O | MF100 Flange | |
| Cabinet Exhaust | -30 ~ -60㎜H2O | MF100 Flange | |
| NaOH (option) | 0.5 ~ 1 kg/㎠ | 1 ½” PVC double containment | |
