ㆍ개요
HFU SYSTEM은 규격화된 유니트를 천정면에 자유롭게 설치할 수 있는 구조로 되어 있으며 현재 국내 크린룸에 가장 많이 적용되고 있음.
ILJIN ENG
Clean room manufacturer, Clean room system, Air conditioning and chilling system and more
| Name |
HFU |
| Model | IJHFU-17 |
| Series | Clean Room System |
Product Description
Products of ILJIN ENG
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Air conditioning and Refrigeration System
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Thermo Hygrostat System
Air conditioning and Refrigeration System
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Dehumidifying System
Air conditioning and Refrigeration System
DC Series
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Freezing & Refrigeration System
Air conditioning and Refrigeration System
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GHP System
Air conditioning and Refrigeration System
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Clean Room System
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Basic Knowledge
Clean Room System
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AHU
Clean Room System
IJAHU-Series
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ACU
Clean Room System
IJE-CAU Series
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FFU
Clean Room System
IJFFU-19
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BFU
Clean Room System
IJBFU-30
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HFU
Clean Room System
IJHFU-17
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Relief Damper
Clean Room System
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Air Curtain
Clean Room System
IJ-Series
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Clean Booth
Clean Room System
IJCB-S-Series
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Clean Bench
Clean Room System
ICB-Series
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Pass Box
Clean Room System
IBP-W-Series
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Air Shower
Clean Room System
A/S-Series
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Fume Hood
Clean Room System
IJFH-01/02
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Clean Locker
Clean Room System
IJCL-01/02/03/04
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Clean Cabinet
Clean Room System
IJCC-01/02/03
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Clean Cart
Clean Room System
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Clean Container
Clean Room System
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Clean Toilet
Clean Room System
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크린룸도입시 고려사항 / 사용 및 유지방법
Clean Room System
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Others
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CDA (Clean Dry Air) System
Others
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PV (Process Vacuum) System
Others
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Gas System
Others
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DI Water System
Others
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Exhaust System (ACID)
Others
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PCW (Process Cooling Water) System
Others
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Exhaust System (Heat / Gen)
Others
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Exhaust System (Organic)
Others
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크린 반송
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LCD 비접촉반송 및 세정
크린 반송
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웨이퍼 반송 및 핸들링
크린 반송