ㆍ개요
크린룸 입,출입 물품을 오염으로부터 방지
ㆍ특징
1. 캐비넷 내부는 항상 양압에 의해 Door 개폐시 외기오염이나 공기의 진입을 막아, 기구기재의 청정도를 유지
2. 이동이 자유롭다
ILJIN ENG
Clean room manufacturer, Clean room system, Air conditioning and chilling system and more
| Name |
Clean Cabinet |
| Model | IJCC-01/02/03 |
| Series | Clean Room System |
Product Description
Products of ILJIN ENG
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Air conditioning and Refrigeration System
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Thermo Hygrostat System
Air conditioning and Refrigeration System
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Dehumidifying System
Air conditioning and Refrigeration System
DC Series
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Freezing & Refrigeration System
Air conditioning and Refrigeration System
-
GHP System
Air conditioning and Refrigeration System
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Clean Room System
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Basic Knowledge
Clean Room System
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AHU
Clean Room System
IJAHU-Series
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ACU
Clean Room System
IJE-CAU Series
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FFU
Clean Room System
IJFFU-19
-
BFU
Clean Room System
IJBFU-30
-
HFU
Clean Room System
IJHFU-17
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Relief Damper
Clean Room System
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Air Curtain
Clean Room System
IJ-Series
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Clean Booth
Clean Room System
IJCB-S-Series
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Clean Bench
Clean Room System
ICB-Series
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Pass Box
Clean Room System
IBP-W-Series
-
Air Shower
Clean Room System
A/S-Series
-
Fume Hood
Clean Room System
IJFH-01/02
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Clean Locker
Clean Room System
IJCL-01/02/03/04
-
Clean Cabinet
Clean Room System
IJCC-01/02/03
-
Clean Cart
Clean Room System
-
Clean Container
Clean Room System
-
Clean Toilet
Clean Room System
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크린룸도입시 고려사항 / 사용 및 유지방법
Clean Room System
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Others
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CDA (Clean Dry Air) System
Others
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PV (Process Vacuum) System
Others
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Gas System
Others
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DI Water System
Others
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Exhaust System (ACID)
Others
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PCW (Process Cooling Water) System
Others
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Exhaust System (Heat / Gen)
Others
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Exhaust System (Organic)
Others
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크린 반송
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LCD 비접촉반송 및 세정
크린 반송
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웨이퍼 반송 및 핸들링
크린 반송