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JINWOO ENGINEERING

Manufacturer of Automobile facility, Super precision welding facility, Measuring inspection facility, Electron gun production facility
Name

AF Coater

Series Plasma Application
Product Description

AF Coater

This equipment deposits Fluorine Chemical Compound on to the product surface using PeCVD & Thermal Evaporation method in addition to supplementing the adhesive Anti-Finger function.
It is intended for AF Plating on tempered glasses used on Smart Phones & Tablet PCs.

JINWOO ENGINEERING AF Coater

Features

1

High

User Friendly

1. Rotative & Orbital Load/Unloading
2. Magazine 12ea Load/Unloading

Production Capacity

4~6 times larger than E-Beam [Size]

2

Low

Chamber Size

3/4 of E-Beam

Temp (25~35˚)

80℃ or higher than E-Beam

Operating Cost

Lower Vacuum Pumping than E-Beam

Coefficient Of Friction

 

 

Specification

Works Space

L4500*D6500*H2700

Weight

4.5 Tons

Main

Chamber

Φ1,600*H1600

Source

PeCVD+ Evaporation

Work Jig

Φ300 * 12 Axis

Pump

Diffusion Pump

20” 1 Set

Rotary & Booster Pump

E2M275 & EH2600

Vacuum Level

5*10-5torr

Option

Chiller

15RT

Poly Coldp

100,000L/Sec

 

Layout

JINWOO ENGINEERING AF Coater  1

 

Comparison

 

Wise AF-1600 PeCVD ( Φ1,600 )

E-Beam AF ( Φ2,050 )

Capa

Batch Time

40min

45min

Glass Size

4”

7”

10.1”

4”

7”

10.1”

1 Batch

1,080

320

192

260

99

135

Day [22Hr]

35,640

10,560

6,336

8,580

3,267

1,155

Month [26Day]

926,640

274,560

164,736

223,080

84,942

30,030

Deposition Temp

25~35℃

80℃ or higher

Target

Rotative & Orbital Magazine 12ea

Dome