Application
- Etch
- CVD (Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
Features
- 2Step(soft & fast) pumping
- Pneumatic Actuator
- Fast valve welded bellows (AM350)
- Easy to service
Options
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
- Bellows Material (SS316L , Inconel )
Pressure range | 1 x 10-9 mbar to 1.2 bar | |
Leak rate : body, seat | < 1 x 10-9 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.2 bar in either direction | |
Material | Valve body, Bonnet | SS304, AL6061 |
Welded bellows | AM350 | |
Valve actuator | AL6061, SS304 | |
Seal Materials | FKM(VITON) | |
Temperature | Valve body | 120℃ |
Valve actuator | 60℃ | |
Operation | Double acting | |
Cycle until first service | 1 million | |
Position sensor | SMC (D-A93) | |
