Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
Features
- Pneumatic actuator
- Bypass pumping line
- Low Vibration Easy maintenance
Options
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Pressure range | 1 x 10-7 mbar to 1.5 bar | |
Leak rate : body, seat | < 1 x 10-7 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.5 bar in either direction | |
Material | Valve body | AL6061 |
Gate | AL6061 | |
Valve actuator | AL6061, SS304 | |
Seal Materials | FKM(VITON) | |
Temperature | Valve body | 120℃ |
Valve actuator | 60℃ | |
Operation | Double acting | |
Cycle until first service | 500,000 | |
Position sensor | SMC (D-A93) | |
