Application
- High vacuum process
- All CVD process (including MO, PE, HDP, LP and AP)
- Photovoltaic and semiconductor application
Features
- Pneumatic actuator
- Rated for 1 million cycles
- Particle free
- Easy maintenance
Options
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Pressure range | 1 x 10-8 mbar to 1.5 bar | |
Leak rate : body, seat | < 1 x 10-8 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.5 bar in either direction | |
Material | Valve body, Bonnet seal, Blade | AL6061 |
Valve actuator | AL6061 | |
Seal material | FFKM(Chemrez®) | |
Temperature | Valve body | 150℃ |
Valve actuator / Sensor | 100℃ / 60℃ | |
Operation | Double acting | |
Cycle until first service | 1 million | |
Position sensor | SMC (D-A93) | |
