Application
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/frat panel precess
- All other cluster vacuum systems
Features
- Semi standard application
(Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Particle and vibration free
- Realization of exact L-motion
- Easy maintenance
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
- Double gate seal door valve available
Pressure range | 1 x 10-9 mbar | |
Leak rate : body, seat | < 1 x 10-9 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.0 bar in either direction | |
Material | Gate | AL6061 |
Valve actuator | SS304, AL6061 | |
Seal Materials | FKM(VITON) | |
Temperature | Valve actuator | 60℃ |
Operation | Double acting | |
Cycle until first service | 3 million | |
Position sensor | SMC (D-A93) | |
