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PRESYS

Semi conductor equipment manufacturer, Software, Valve, New renewable energy and more
Name

Dual Seal Type

Model V77 Series
Series Rectangular Gate Valves
Catalog presys_60328_ksuvdd.pdf
Product Description

Application 
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/frat panel precess
- All other cluster vacuum systems 
 
Features 
- Semi standard application 
  (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Particle and vibration free 
- Realization of exact L-motion
- Easy maintenance 

 
Options 
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
- Double gate seal door valve available 
 

 

 

 

PRESYS Dual Seal Type V77 Series


 

Pressure range

1 x 10-9 mbar

Leak rate : body, seat

< 1 x 10-9 mbar.ℓ/s

Differential pressure on the gate

 ≤ 1.0 bar in either direction

Material

Gate

AL6061

Valve actuator

SS304, AL6061

Seal Materials

FKM(VITON)

Temperature

Valve actuator

60℃

Operation

Double acting

Cycle until first service

3 million

Position sensor

SMC (D-A93)