Application
- Etch
- CVD (Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
Features
- Extremely long life time
- Heating System
- Pneumatic Actuator
- Welded Bellows Seal
- Easy to service
Options
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
- Heating Temperature
- Bellows Material
Pressure range | 1 x 10-7 mbar to 1.2 bar | |
Leak rate : body, seat | < 1 x 10-7 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.2 bar in either direction | |
Material | Valve body | AL6061 |
Welded bellows | Inconel | |
Valve actuator | AL6061, SS304, Ultem | |
Seal Materials | FFKM(Kalrez® / Chemraz®) | |
Temperature | Valve body | 150℃ |
Valve actuator | 100℃ | |
Operation | Single acting | |
Cycle until first service | 1 million | |
Position sensor | SMC (D-A93) | |
