LOGO

PRESYS

Semi conductor equipment manufacturer, Software, Valve, New renewable energy and more
Name

Heated Angle Valve With Temp Controller

Model V42 Series
Series Special Valves
Catalog presys_60339_blrkzy.pdf
Product Description

Application 
- Etch
- CVD (Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
 
 
Features 
- Extremely long life time
- Heating System
- Pneumatic Actuator
- Welded Bellows Seal 
- Easy to service
 
 
Options 
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
- Heating Temperature 
- Bellows Material  
 

 

 

PRESYS Heated Angle Valve With Temp Controller V42 Series


 

Pressure range

1 x 10-7 mbar to 1.2 bar

Leak rate : body, seat

< 1 x 10-7 mbar.ℓ/s

Differential pressure on the gate

 ≤ 1.2 bar in either direction

Material

Valve body

AL6061

Welded bellows

Inconel

Valve actuator

AL6061, SS304, Ultem

Seal Materials

FFKM(Kalrez® / Chemraz®)

Temperature

Valve body

150℃

Valve actuator

100℃

Operation

Single acting

Cycle until first service

1 million

Position sensor

SMC (D-A93)