Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
Features
- Compact
- Low vibration operation
- Easy and fast maintenance
- Pneumatic actuator
- Actuator Up/Down install possibility
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Pressure range | 1 x 10-7 mbar to 1.2 bar | |
Leak rate : body, seat | < 1 x 10-7 mbar.ℓ/s | |
Differential pressure on the gate | ≤ 1.2 bar in either direction | |
Material | Valve body, Gate | SS304, AL6061 |
Valve actuator | SS304, AL6061 | |
Seal Materials | FKM(VITON) | |
Temperature | Valve body | 120℃ |
Valve actuator | 80℃ | |
Operation | Double acting | |
Cycle until first service | 100,000 | |
Position sensor | SMC (D-A93) | |
